TEM-sampling
EquipmentDual Beam Focused Ion Beam
Using the dual beam FIB, you can create a sample capable of TEM measurement with a thickness of several tens of nm for the location where you want to perform TEM analysis.
Introduction
The FIB can etch fine areas by injecting ion beams, and the SEM column can be used observe highresolution images. Using the etching of the FIB, you can make samples of several tens of nm thick films in vertical and horizontal directions for the areas where you want to observe the TEM. In addition, the low accelerated voltage ion beams can be used to minimize the damage layer when producing a sample.
Application
TEM-sampling (Vertical), TEM-sampling (Plane)
The Equipment
QRT FIB/TEM Portfolio Overview
FIB Specifications
Technical Use Case
TEM lamella prep – Vertical, Plane
TEM lamella prep Procedure
Contact Point
Person in charge
TEM Sample
Preparation Inquiry
Preparation Inquiry
- • TEL.
- 031-546-7555
- • E-mail.
- kwonhyeong.lee@qrtkr.com