TEM/EDS/EELS
EquipmentTransmission electron microscopy
An analytic technique to observe the internal structure of the sample at an atomic level
Introduction
TEM is an equipment that can analyse the microstructure and crystal structure of materials by irradiating accelerated electron beams to samples manufactured to a thickness of 100 nm or less and utilising images and diffraction patterns obtained from transmitted and diffracted electrons. It is possible to analyse the components of the micro area using the mounted EDS or EELS.
Application
Semiconductor device
LED device
Battery Materials
Thin film, powder material
The Equipment
-
- Manufacturer / Model
Spectra 200 / ThermoFisher Scientific
-
Feature
Description
Function
TEM : BF/DF image, Diffraction
STEM : BF/HAADF image
EDS : Qualitative & Quantitative analysisTEM
E gun source
CFEG(Cold Field Emission Gun)
High Tension
30~200kV
Energy resolution
0.4eV
STEM resolution
60pm(@200kV), 136pm(@30kV)
Corrector
Cs Probe Corrector
Accessory
EDS
Dual X-EDS Detector (100 mm × 2)
Application
Microstructure analysis (HR image)
- Thin film thickness measurement
- Multi layer structure analysis
- Defect analysisCrystal structure analysis (Diffraction pattern)
- Crystallinity, Defect, Lattice deformationElement analysis
- Qualitative & Quantitative analysis
- Point analysis/Line scan/MappingQRT One-Stop Service
TEM analysis : within 72hrs after TEM sampling
Key Features
Key Features |
Description |
|---|---|
One-Stop Service |
TAT : within 72hrs after TEM sampling |
Real-Time Participation |
Sharing TEM screen during TEM analysis with customer using high security online infra |
Expert Guidance |
Differentiated customer-friendly TEM analysis service |
Technical Use Case
HR TEM imaging
Atomic Resolution TEM / STEM-HAADF Image
EDS Mapping
EELS Analysis
Contact Point
Person in charge- • TEL.
- 031-546-7555
- • E-mail.
- soonha.hwang@qrtkr.com